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Risorse bibliografiche
Risorsa bibliografica obbligatoria
Risorsa bibliografica facoltativa
Scheda Riassuntiva
Anno Accademico 2018/2019
Scuola Scuola di Ingegneria Industriale e dell'Informazione
Insegnamento 089727 - MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS)
Docente Corigliano Alberto
Cfu 5.00 Tipo insegnamento Monodisciplinare

Corso di Studi Codice Piano di Studio preventivamente approvato Da (compreso) A (escluso) Insegnamento
Ing Ind - Inf (Mag.)(ord. 270) - MI (491) MATERIALS ENGINEERING AND NANOTECHNOLOGY - INGEGNERIA DEI MATERIALI E DELLE NANOTECNOLOGIE*AZZZZ089727 - MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS)

Obiettivi dell'insegnamento

The course aim at:

 

- describing the fundamental steps of micro-fabrication for Micro-Electro-Mechanical-Systems (or Microsystems);

- describing the mechanical principles that rule the behaviour of Microsystems;

- describing the fundamental multi-physics interactions that rule the behaviour of Microsystems;

- presenting the main microsystems as e.g. inertial accelerometers and gyroscopes;

- describing the main reliability problems in Microsystems;

- presenting the main method for multi-physics modelling and simulation in Microsystems;

- presenting the main experimental mechanical characterization methods for materials used in Microsystems;

- presenting the main applications of MEMS.


Risultati di apprendimento attesi

After attending the course and after the final examination, the student will:

 

- know which are the main applications and modern trends in the use of Microsystems;

- know the fundamental physical principles that rule the behaviour of Microsystems;

- know the main reliability problems related to Microsystems;

- know the main multi-physics modelling and simulation methods for Microsystems;

- know how to design simple microsystems as far as the non electronic part is concerned;

- critically discuss state of the art scientific works on MEMS;

 

The student will be able to discuss the above acquired knowledges with a clear and appropriate language and will be able to reproduce the fundamental reasoning and proofs  presented during the classes.


Argomenti trattati

- General presentation of Micro Electro Mechanical Systems (or Microsystems): recent developments and future perspectives

- Micro-fabrication technology: processes description, from lithography to the final device.

- Fundamentals of mechanics and multi-physics problems for microsystems.

- Actuators: capacitive, electro-thermal, piezoelectric.

- Microsystem description: accelerometers, gyroscopes, magnetometers, pressure sensors, micro-pumps, piezo-micro-ultrasound-transducers (PMUT).

- Modelling and simulation: multi-physics modelling, reduced order models and continuum models.

- Microsystem reliability: fracture, fatigue, spontaneous adhesion (stiction), pull-in instability, accidental drop.

- Practical examples

 

 


Prerequisiti

Requested background

 

Mathematical analysis

 

Fundamental courses on physics


Modalità di valutazione

The examination includes the following parts.

- A personal work on a subject agreed with the Professor in which the student applies the knowledge acquired during the course and critically discusses a MEMS or a peculiar problem related to MEMS. 

- Oral presentation of the previous work during the exam and question and answer session with the Professor.

- An oral exam in which the examiner check the student's preparation asking supplementary information on the Course's subjects. 

The student during the final oral exam must be able to clearly describe and critically discuss the topics, with the related hyoptheses, the critical points, the physical meaning and their consequences.


Bibliografia
Risorsa bibliografica obbligatoriaA. Corigliano, R. Ardito, C. Comi, A. Frangi, A. Ghisi, S. Mariani, Mechanics of Microsystems, Editore: Wiley, Anno edizione: 2018, ISBN: 978-1-119-05383-5 https://www.wiley.com/en-gb/Mechanics+of+Microsystems-p-9781119053835
Risorsa bibliografica facoltativaT.M. Adams, R.A. Layton, Introductory MEMS, Editore: Springer, Anno edizione: 2010
Risorsa bibliografica facoltativaS. D. Senturia, Microsystem design, Editore: Kluwer Academic publishers, Anno edizione: 2001
Risorsa bibliografica facoltativaS. E. Lyshevski, MEMS and NEMS. Systems, devices and Structures, Editore: CRC Press, Anno edizione: 2002
Risorsa bibliografica facoltativaJ. G. Korvink, O. Paul eds., MEMS: A Practical Guide to Design, Analysis, and Applications, Editore: William Andrew Inc. and Springer-Verlag, Anno edizione: 2006
Risorsa bibliografica facoltativaA. Frangi, N. Aluru, C. Cercignani, S. Mukherjee eds, Advances in multiphysics simulation and experimental testing of MEMS, Editore: Imperial College Press, Anno edizione: 2008
Risorsa bibliografica obbligatoriaCourse notes available on Beep for Polimi students https://beep.metid.polimi.it/

Forme didattiche
Tipo Forma Didattica Ore di attività svolte in aula
(hh:mm)
Ore di studio autonome
(hh:mm)
Lezione
37:30
56:15
Esercitazione
10:00
15:00
Laboratorio Informatico
0:00
0:00
Laboratorio Sperimentale
2:30
3:45
Laboratorio Di Progetto
0:00
0:00
Totale 50:00 75:00

Informazioni in lingua inglese a supporto dell'internazionalizzazione
Insegnamento erogato in lingua Inglese
Disponibilità di materiale didattico/slides in lingua inglese
Disponibilità di libri di testo/bibliografia in lingua inglese
Possibilità di sostenere l'esame in lingua inglese
Disponibilità di supporto didattico in lingua inglese
schedaincarico v. 1.6.1 / 1.6.1
Area Servizi ICT
20/11/2019